Specimen inspection stage implemented with processing stage coupling mechanism
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United States of America Patent
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Feb 15, 2011
Grant Date -
Aug 21, 2008
app pub date -
May 10, 2007
filing date -
Feb 20, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
A specimen inspection stage implemented with a processing stage coupling mechanism provides a capability to conduct with maximum efficiency post-processing specimen inspections on-board a processing platform. Heavy inspection equipment is mounted on a specimen inspection stage that is separate from a processing stage. In a preferred embodiment, the processing stage moves in response to an applied motive force and performs laser-based processing operations on a specimen. While laser processing is ongoing, the specimen inspection stage remains parked in its home position. When it is time for post-processing inspection, a stage coupling and decoupling mechanism couples together the specimen inspection stage and the processing stage, which transports the specimen inspection stage to and from the specimen position.
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