Substrate holding device, substrate processing system and liquid crystal display device

United States of America Patent

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Apr 12, 2011
Grant Date
Dec 20, 2007
app pub date
Nov 17, 2005
filing date
Nov 22, 2004

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did not detect the associated part of the substrate p.

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Patent Owner(s)

SHARP KABUSHIKI KAISHA

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C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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Inventor Name	Address	# of filed Patents	Total Citations
Yoshida, Yasuzou	Mie, JP	1	9

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Substrate holding device, substrate processing system and liquid crystal display device

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United States of America Patent

11665830

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PATENT NO	7922882
APP PUB NO	20070292632A1
SERIAL NO	11665830
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 12, 2011	US,7922882,B2 US7922882B2	GRANTED PATENT AS SECOND PUBLICATION
December 20, 2007	US,20070292632,A1 US20070292632A1	FIRST PUBLISHED PATENT APPLICATION

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11665830

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