Composition for low dielectric material, low dielectric material and method for production thereof

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United States of America Patent

PATENT NO 7824784
SERIAL NO

12327117

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Abstract

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represents hydrogen atom or alkyl group; and n represents an integer of 1 to 5.

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Patent Owner(s)

  • MITSUBISHI DENKI KABUSHIKI KAISHA;NIPPON SHOKUBAI CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kamiyama, Takuya Takatsuki, JP 20 96
Kumada, Teruhiko Hyogo, JP 32 168
Nobutoki, Hideharu Neyagawa, JP 28 256
Yamamoto, Tetsuya Nishinomiya, JP 577 12280

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