Differential capacitor structure
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United States of America Patent
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-
Apr 10, 2001
Grant Date -
N/A
app pub date -
May 1, 1998
filing date -
May 1, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A differential capacitor structure (10) formed overlying a substrate (12) having a middle layer (24) disposed between a lower layer (18) and an upper layer (28). The lower layer (18) is a static layer that is formed on the substrate (12), the middle layer (24) has a moveable component and is a dynamic layer attached to the substrate (12) using semi-circular tether supports (42), and the upper layer is a static layer that is anchored to the substrate (12). The semi-circular tether supports (42) are formed from a homogeneous material and provide structural stiffness to support the middle layer (24) in space and also provide stress relief.
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Cited Art Landscape
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