Inspection tool and inspection method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11668661
APP PUB NO 20210003521A1
SERIAL NO

17019149

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Abstract

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Apparatuses, systems, and methods for inspecting a semiconductor sample are disclosed. In some embodiments, the sample may comprise a structure having a plurality of openings in a top layer of the structure. In some embodiments, the method may comprise generating an image of the structure using a SEM; inspecting an opening of the plurality of openings by determining a dimension of the opening based on the image and determining an open-state of the opening, based on a contrast of the image; and determining a quality of the opening based on both the determined dimension and the determined open-state of the opening.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dillen, Hermanus Adrianus Maarheeze, NL 16 13
Huisman, Thomas Jarik Eindhoven, NL 7 8
Oorschot, Dorothea Maria Christina Veldhoven, NL 3 14
Wuister, Sander Frederik Eindhoven, NL 97 1096

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