Probe apparatus manufacturing method thereof and substrate inspecting method using the same
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United States of America Patent
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Feb 22, 2005
Grant Date -
N/A
app pub date -
Apr 22, 2002
filing date -
Nov 16, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a probe apparatus comprising an inspecting device, an intermediate substrate and a probe substrate, in which the inspecting device is electrically connected to a proximal end of the intermediate substrate, and the intermediate substrate has a distal end electrically connected to a proximal end of the probe substrate, and the probe substrate has a distal end electrically connectable to a substrate under inspection, a plurality of probe substrates are electrically connected to the single intermediate substrate. When a particular probe substrate 4 is damaged, only the particular probe substrate 4 may be changed, the other probe substrates 4 continuing to be used, thereby achieving economy.
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