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Abstract

Microscope and method for detecting sample light, having at least one illuminating beam which is partially phase-modulated with a modulation frequency along the cross section thereof and a microscope objective for intensity-modulated focusing of the illuminating beam into a sample. The microscope has a detection beam path that has at least one demodulator. At least one electro-optical modulator (EOM) is used for phase modulation of at least a part, preferably half, of the illuminating beam, or different portions or halves of the illuminating beam are modulated differently, preferably anti-phase, by anti-phase control of piezoelectric elements, or acousto-optical modulators for splitting into a plurality of partial beam paths. Optic elements are provided for partial phase modulation of the excitation beam. Actuating elements are provided for setting the phase difference, or at least one optic modulator, preferably an acousto-optical modulator (AOM) is used for demodulation in the detection, or a change in the mode of operation of the detectors for demodulation takes place. In the case of foci distribution, produced for example by a spinning micro-lens disc or multi-spot generation, the individual foci are subjected to an intensity modulation, either by arranging a half-space phase mask in a pupil plane of the objective or by individually manipulating each partial beam by means of the partial phase modulation of said partial beam with a modulation frequency along the cross section thereof or by manipulating a beam by means of the partial phase modulation of said beam with a modulation frequency along the cross section thereof and subsequent subdivision of said beam.

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