Article transporter in semiconductor fabrication

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11251063
APP PUB NO 20210028049A1
SERIAL NO

17065022

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Abstract

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A transporter for transporting an article used in semiconductor fabrication is provided. The transporter includes a robotic arm. The transporter further includes two platens connected to the robotic arm. Each of the two platens an inner surface facing the other, and a number of gas holes are formed on each of the inner surfaces of the two platens. The transporter also includes a gas supplier placed in communication with the gas holes. The gas supplier is used to control the flow of gas through the gas holes.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lai, Jen-Chieh Tainan, TW 12 20
Lin, Shih-Ho Jhubei, TW 30 85
Su, Jheng-Si Zhubei, TW 7 14
Wei, Yu-Chen New Taipei, TW 17 31
Yang, Chih-Yuan Hsinchu, TW 65 226

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