Apparatus and method for estimating background tilt and offset
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United States of America Patent
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May 7, 2002
Issued Date -
N/A
app pub date -
Sep 1, 2000
filing date -
Feb 27, 1996
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Abstract
A computer implemented software device for estimating background tilt and offset is disclosed to preferably be adaptable to an optical measurement instrument wherein the estimated parameters are resolved to generate a reference plane to be subtracted from a height map of a phase profile. A set of histograms of heights is used to develop a merit function. A two-dimensional high speed iterative search is used to optimize the merit function to generate a reference plane coincident with the spatial tilt of the phase profile. The invention enables real-time measurement of substrate height for preferred use in high-speed image processing operations relating to circuit-board production lines.
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