Film forming apparatus, control device, and pressure gauge adjustment method
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United States of America Patent
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Nov 1, 2022
Grant Date -
N/A
app pub date -
Oct 7, 2020
filing date -
Oct 18, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A film forming apparatus includes: a pressure-reducible processing container; a pressure gauge configured to detect a pressure in the processing container; and a controller, wherein the controller is configured to repeat a cycle including a step of adjusting a zero point of the pressure gauge and a step of executing a film forming process in the processing container until an ultimate pressure, which is detected by the pressure gauge when an interior of the processing container is evacuated to a highest reachable vacuum degree after the step of executing the film forming process, reaches a target range.
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