Precision vibration-isolation system with floor feedforward assistance

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United States of America Patent

PATENT NO 11873880
APP PUB NO 20230092923A1
SERIAL NO

18057571

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Abstract

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Apparatus and methods to reduce unwanted motion in precision instruments are described. An active vibration-isolation system may include a feedback loop that senses motion of an intermediate mass. In noisy environments, where the feedback loop would otherwise fail or provide inadequate isolation, feedforward control can be implemented to sense floor vibrations and reduce motion of the intermediate mass that would otherwise be induced by the floor vibrations. The feedforward control can reduce motion of the intermediate mass to a level that allows the feedback loop to operate satisfactorily.

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Patent Owner(s)

Patent OwnerAddress
TECHNICAL MANUFACTURING CORPORATION15 CENTENNIAL DRIVE PEABODY MA 01960

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kordunsky, Igor Quincy, US 12 344
Lopes, Antonio Salem, US 7 59
Worthey, Jeffrey L Waltham, US 4 8

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