Optical device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11703679
APP PUB NO 20210155471A1
SERIAL NO

16625695

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Abstract

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An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.

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Patent Owner(s)

  • HAMAMATSU PHOTONICS K. K.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kotani, Kyosuke Hamamatsu, JP 40 64
Sugimoto, Tatsuya Hamamatsu, JP 70 186
Suzuki, Tomofumi Hamamatsu, JP 77 415

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