MEMS resonator

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United States of America Patent

PATENT NO 11724934
APP PUB NO 20230183060A1
SERIAL NO

18072506

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Abstract

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Multiple degenerately-doped silicon layers are implemented within resonant structures to control multiple orders of temperature coefficients of frequency.

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Patent Owner(s)

Patent OwnerAddress
SITIME CORPORATION5451 PATRICK HENRY DRIVE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doll, Joseph C Mountain View, US 21 117
Grosjean, Charles I Los Gatos, US 55 195
Hagelin, Paul M Saratoga, US 67 488
Hill, Ginel C Sunnyvale, US 25 77
Miller, Nicholas Sunnyvale, US 50 562

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