Multibeamlet charged particle device and method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11309163
APP PUB NO 20210142976A1
SERIAL NO

16676717

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Abstract

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A method of method of operating a multibeamlet charged particle device is disclosed. In the method, a target attached to a stage is translated, and each step of selecting beamlets, initializing beamlets, and exposing the target is repeated. The step of selecting beamlets includes passing a reconfigurable plurality of selected beamlets through the blanking circuit. The step of initializing beamlets includes pointing each of the selected beamlets in an initial direction. The step of exposing the target includes scanning each of the selected beamlets from the initial direction to a final direction, and irradiating a plurality of regions of the target on the stage with the selected beamlets.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bencher, Christopher Dennis Cupertino, US 98 4424
Engel, Lior Sunnyvale, US 3 14
Fawaz, Hussein Versoix, CH 1 0
Perlmutter, Robert La Jolla, US 5 63
Sreerambhatla, Krishna Eindhoven, NL 1 0
Vaez-Iravani, Mehdi Los Gatos, US 118 2260

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