Dielectric gap fill

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11817343
APP PUB NO 20210225692A1
SERIAL NO

17222012

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Generally, examples are provided relating to filling gaps with a dielectric material, such as filling trenches between fins for Shallow Trench Isolations (STIs). In an embodiment, a first dielectric material is conformally deposited in a trench using an atomic layer deposition (ALD) process. After conformally depositing the first dielectric material, the first dielectric material is converted to a second dielectric material. In further examples, the first dielectric material can be conformally deposited in another trench, and a fill dielectric material can be flowed into the other trench and converted.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Peng, Yu-Yun Hsinchu, TW 70 457

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