Optical characteristics measuring device and optical characteristics measuring method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11209374
APP PUB NO 20200064279A1
SERIAL NO

16285196

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Abstract

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An optical characteristics measuring device includes a first light source capable of irradiating a sample with light and a second light source capable of irradiating the sample with microwaves. A measuring device measures microwave power of the reflection of the microwaves from the sample. A calculation unit calculates a parameter relating to the electrical conductivity of the sample using the microwave power of the reflected waves measured by the measuring device. A control unit controls the intensity of the light of the first light source so that the parameter becomes approximately a predetermined value. The calculation unit specifies first to n-th intensities of the light at which the parameter becomes approximately the predetermined value for each of the first to n-th wavelengths of the light and obtains relationships between the first to n-th wavelengths and the first to n-th intensities corresponding to the respective first to n-th wavelengths.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hoshino, Ken Yokkaichi Mie, JP 14 89

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