Process for fabricating an array of germanium-based diodes with low dark current

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United States of America

PATENT NO 11264425
APP PUB NO 20200176503A1
SERIAL NO

16695265

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A process for fabricating an optoelectronic device including an array of germanium-based photodiodes including the following steps: producing a stack of semiconductor layers, made from germanium; producing trenches; depositing a passivation intrinsic semiconductor layer, made from silicon; annealing, ensuring, for each photodiode, an interdiffusion of the silicon of the passivation semiconductor layer and of the germanium of a semiconductor portion, thus forming a peripheral zone of the semiconductor portion, made from silicon-germanium.

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Patent Owner(s)

  • COMMISSARIAT A L' ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aliane, Abdelkader Grenoble, FR 47 122
Hartmann, Jean-Michel Grenoble, FR 23 54
Ouvrier-Buffet, Jean-Louis Grenoble, FR 39 297
Widiez, Julie Grenoble, FR 12 92

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