Adherent all-gold electrode structure for lithium niobate based devices and the method of fabrication

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United States of America Patent

PATENT NO 6867134
APP PUB NO 20040002205A1
SERIAL NO

10393508

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Abstract

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An electrode structure wherein galvanic corrosion at adhesion layers formed between electrodes and electronic or electro-optic substrates is eliminated. The electrode structure includes an electro-optic crystalline substrate, an amorphous layer disposed on the crystalline substrate, the amorphous layer having a composition substantially similar to a composition of the crystalline substrate, and a gold layer disposed directly on the amorphous layer. The amorphous layer is created using ion sputtering etching techniques that clean and activate the surface of the crystalline substrate such that the gold layer is able to adhere to it.

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Patent Owner(s)

  • LUMENTUM OPERATIONS LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bosenberg, Walter Simsbury, CT 1 11
Brodsky, Lawrence Tolland, CT 1 11
Chen, Xingfu Eden Prairie, MN 15 253
Clark, John Somers, CT 128 1975
Lynch, Daniel Southwick, MA 14 169
Mark, Nelson Manchester, CT 4 20
Xu, Jason New Haven, CT 7 442

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