Optical device and production method thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7120331
APP PUB NO 20050191005A1
SERIAL NO

11068037

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An optical device according to an embodiment of the present invention has an actuator structure. The actuator structure has a substrate, a stationary electrode, a movable electrode, an optical element, and a hole portion. The stationary electrode is provided on a surface of the substrate. The movable electrode is provided on the surface of the substrate. The optical element is provided on the movable electrode. The substrate faces the movable electrode. The hole portion is formed in a part of the substrate. A region near the movable electrode where the optical element is provided is immersed in a matching oil.

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Patent Owner(s)

  • SUMITOMO ELECTRIC INDUSTRIES, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanie, Tomohiko Yokohama, JP 22 104
Katayama, Makoto Yokohama, JP 88 612
Shimazu, Takayuki Yokohama, JP 39 113

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