Bake system
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United States of America Patent
Stats
-
Jan 8, 2008
Grant Date -
Jan 19, 2006
app pub date -
Jun 21, 2005
filing date -
Jun 21, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Provided is a bake system. The bake system includes a heating plate having a heating plate having a substrate on an upper surface. A case is disposed below the heating plate to support the heating plate; a first cover is disposed above the heating plate and coupled to the case to form a chamber; and a second cover is disposed in the first cover, and directly above the substrate in the bake process for preventing heat convection on the substrate.
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