Method of cutting conductive patterns

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United States of America Patent

PATENT NO 11429028
SERIAL NO

16683150

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Abstract

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A method includes: providing a first layout of a first layer over a substrate, the first layer having at least one metal pattern, and generating a second layout by placing a cut mask at a first position relative to the substrate to remove material from a first region of the at least one metal pattern to provide a first metal pattern and placing the cut mask at a second position relative to the first layer over the substrate to remove material from a second region of the at least one metal pattern to provide a second metal pattern.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Huang-Yu Zhudong Township, Hsinchu County, TW 57 872
Chen, Wen-Hao Hsin-Chu, TW 104 615
Hsu, Chin-Hsiung Guyanyin Township, TW 29 586
Ou, Tsong-Hua Taipei, TW 39 479

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