MEMS device, inertial measurement unit, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
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United States of America Patent
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Oct 5, 2021
Grant Date -
Apr 11, 2019
app pub date -
Oct 10, 2018
filing date -
Oct 11, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
A MEMS device includes: a base (substrate) having a support part and a fixed electrode (detection electrode); a movable member supported on the support part with a main surface facing the fixed electrode; and a lid joined to the base and forming an accommodation space in which the movable member is accommodated. The lid has an abutting part which faces, via a space, at least a part of an outer edge of the movable member accommodated in the accommodation space and regulates displacement in an in-plane direction of the main surface.
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