Method of fabricating nozzle assembly having moving roof structure and sealing bridge
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United States of America Patent
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Jan 4, 2011
Issued Date -
N/A
app pub date -
Nov 26, 2008
filing date -
Nov 26, 2008
priority date (Note) -
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Abstract
A method of fabricating an inkjet nozzle assembly having a seal member bridging between a moving portion and a stationary portion. The method includes the steps of: (a) providing a partially-fabricated printhead comprising a nozzle chamber sealed with a roof, (b) etching a via through the roof to define the moving portion on a first side of the via and the stationary portion on a second side of the via; (c) plugging the via with a plug of sacrificial material; (d) depositing a layer of flexible material over the plug; and (e) removing the plug to provide the inkjet nozzle assembly. The resultant seal member is comprised of the flexible material.
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