System for megasonic processing of an article
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United States of America Patent
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Apr 14, 2009
Grant Date -
Jan 10, 2008
app pub date -
Aug 16, 2007
filing date -
Sep 30, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
A system for megasonic processing of an article. In one aspect, the system for megasonic processing comprises a rotary support for supporting an article, a dispenser for applying a fluid to a surface of an article positioned on the rotary support; and a transducer assembly. The transducer assembly comprises (i) a transmitter positioned adjacent to the article on the rotary support so that when the fluid is applied to the surface of the article via the dispenser, a meniscus of the fluid is formed between a portion of the transmitter and the surface of the article and (ii) not more than one transducer coupled to the transmitter, the transducer adapted to oscillate at a frequency for propagating megasonic energy through the transmitter and into the meniscus of the fluid.
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