Multi-compartment electrochemical replenishment cell

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11697887
SERIAL NO

17078413

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Electroplating systems may include an electroplating chamber. The systems may also include a replenish assembly fluidly coupled with the electroplating chamber. The replenish assembly may include a first compartment housing anode material. The first compartment may include a first compartment section in which the anode material is housed and a second compartment section separated from the first compartment section by a divider. The replenish assembly may include a second compartment fluidly coupled with the electroplating chamber and electrically coupled with the first compartment. The replenish assembly may also include a third compartment electrically coupled with the second compartment, the third compartment including an inert cathode.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hanson, Kyle M Kalispell, US 152 2401
Kalaikadal, Deepak Saagar Kalispell, US 4 0
McHugh, Paul R Kalispell, US 113 1613
Sharbono, Charles Whitefish, US 10 7
Van, Valkenburg Paul Whitefish, US 3 2
Wilson, Gregory J Kalispell, US 143 1688
Zimmerman, Nolan L Kalispell, US 10 28

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jan 11, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Jan 11, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jan 11, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00