Methods and apparatus for pressure compensation in a mass flow controller
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United States of America Patent
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Sep 25, 2007
Grant Date -
Oct 13, 2005
app pub date -
Jun 8, 2005
filing date -
Jul 19, 2002
priority date (Note) -
In Force
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Abstract
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
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