L-motion slit door for substrate processing chamber

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United States of America Patent

PATENT NO 11488806
APP PUB NO 20210351014A1
SERIAL NO

16870740

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Abstract

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Embodiments of process kits for use in a process chamber are provided herein. In some embodiments, a process kit includes a slit door having an arcuate profile and including a first plate coupled to a second plate, wherein the first plate is configured to be coupled to an actuator, and wherein the second plate has a processing volume facing surface that includes silicon.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Noorbakhsh, Hamid Oakland, US 69 2008

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