Method of manufacturing optical element, and optical element
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United States of America Patent
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Aug 3, 2010
Grant Date -
Nov 12, 2009
app pub date -
Jul 20, 2009
filing date -
Jun 6, 2007
priority date (Note) -
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Abstract
A method of manufacturing an optical element having a good reflection preventing characteristic is provided in which an irregularity structure having a reflection preventing function can be formed at low temperature. The method includes forming a film on the optical substrate by using a coating liquid containing a metal alkoxide containing at least aluminum, immersing the film in a water-containing liquid, baking the film having been immersed in the water-containing liquid, and subjecting the film having been baked to treatment with warm water to form an aluminum-containing film having a fine irregularity structure.
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