Bi metal subtractive etch for trench and via formation

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11328954
APP PUB NO 20210287940A1
SERIAL NO

16817988

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Abstract

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Embodiments of the present invention disclose a method forming a via and a trench. By utilizing a first etching process, a first metal layer of a multi-layered device to form a via, wherein the multi-layered device comprises the first metal layer and a second metal layer, wherein the first metal layer is formed directly on top of the second metal layer, wherein the second metal layer acts as an etch stop for the first etching process, wherein the first etching process does not affect the second metal layer. By utilizing a second etching process, the second metal layer of the multi-layered device to form a trench, wherein first metal layer is not affected by the second etching process, wherein the first etching process and the second etching process are two different etching process.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Hsueh-Chung Cohoes, US 165 1089
Mignot, Yann Slingerlands, US 119 279
Ok, Injo Loudonville, US 167 690
Park, Chanro Clifton Park, US 371 2432
Yang, Chih-Chao Glenmont, US 1031 7515

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