Polarizers for image sensor devices
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United States of America Patent
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Dec 12, 2023
Grant Date -
Jul 28, 2022
app pub date -
Apr 11, 2022
filing date -
Nov 15, 2017
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Abstract
The present disclosure is directed to a method of forming a polarization grating structure (e.g., polarizer) as part of a grid structure of a back side illuminated image sensor device. For example, the method includes forming a layer stack over a semiconductor layer with radiation-sensing regions. Further, the method includes forming grating elements of one or more polarization grating structures within a grid structure, where forming the grating elements includes (i) etching the layer stack to form the grid structure and (ii) etching the layer stack to form grating elements oriented to a polarization angle.
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