Wafer boat having improved wafer holding capability
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United States of America Patent
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-
Jan 29, 2002
Grant Date -
N/A
app pub date -
Jun 14, 2000
filing date -
Jun 14, 2000
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A wafer boat for securely holding wafers therein during processing in a vertical furnace and a method for loading dummy wafers into a wafer boat without having to remove/reload for each oxidation process have been disclosed. In the wafer boat, a plurality of cavities are formed by horizontal notches in support posts together with horizontal ridges that are integrally formed with the support posts. A raised portion extending upwardly from a top surface of the horizontal ridge such that any possible outward movements of the dummy wafer, even after repeated loading/unloading operations, from the cavity can be prevented. A suitable height of the raised portion is between about 0.2 mm and about 2 mm, a more preferred range for the height is between about 0.2 mm and about 0.5 mm.
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