Automatic assessment method and assessment system thereof for yield improvement

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United States of America Patent

PATENT NO 11480531
APP PUB NO 20210140897A1
SERIAL NO

16726275

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Abstract

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An assessment system includes a storage device and a processing circuit. The processing circuit is coupled to the storage device and configured to execute the instructions stored in the storage device. The storage device is configured for storing instructions of extracting at least one feature parameter corresponding to at least one defect detected on an object respectively; determining at least one feature evaluation according to the at least one feature parameter respectively; weighting the at least one feature evaluation to calculate at least one weighted feature evaluation respectively; summing the at least one weighted feature evaluation to calculate at least one total score corresponding to at least one lesson-learnt case; and ranking the at least one total score corresponding to the at least one lesson-learnt case to find out a suspected root cause corresponding to one of the at least one lesson-learnt case with higher priority.

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Patent Owner(s)

  • YANGTZE MEMORY TECHNOLOGIES CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cai, Zheng Yi Wuhan, CN 2 0
Fu, Ling Ling Wuhan, CN 1 0
Huang, Tao Wuhan, CN 265 1228
Jin, Xing Wuhan, CN 92 730
Wang, Fei Wuhan, CN 1019 9320
Wang, Yadong Wuhan, CN 85 520
Wu, Jing Yun Wuhan, CN 1 0
Zhao, Ge Ge Wuhan, CN 1 0

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