Stage apparatus, exposure apparatus and device manufacturing method
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United States of America Patent
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Oct 22, 2002
Grant Date -
N/A
app pub date -
Dec 4, 1998
filing date -
Dec 10, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
A stage apparatus includes a stage moving in a prescribed direction while holding a substrate and a mechanism for generating a force that changes in accordance with an acceleration when the stage moves, and for applying the force to the substrate from the direction of the acceleration so that a force applied between the stage and the substrate by the acceleration is canceled.
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