Method and device for aligning a charged particle beam column
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United States of America Patent
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Sep 18, 2007
Grant Date -
Jan 20, 2005
app pub date -
Oct 4, 2002
filing date -
Oct 10, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The invention provides a method for automatically aligning a beam of charged particles with an aperture. Thereby, the beam is defelcted to two edges of the aperture. From the signals required to obtain an extinction, a correction deflection field is calculated. Furter, a method for automatically aligning a beam of charged particles with an optical axis is provided. Thereby a defocusing is introduced and a signal calculated based on an introduced image shift is applied to a deflection unit. Further, a method for correction of the astigmatism is provided. Thereby the sharpness is evaluated for a sequence of frames measured whilst varying the signals to a stigmator.
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