Semi-insulating bulk zinc oxide single crystal
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United States of America Patent
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Aug 30, 2005
Grant Date -
Mar 25, 2004
app pub date -
Jun 23, 2003
filing date -
Jun 24, 2002
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Abstract
A semi-insulating zinc-oxide (ZnO) single crystal. The crystal has resistivity of at least 1.5×103 ohm-centimeter (Ω-cm). The ZnO crystal can be produced from a melt contained by solid-phase ZnO to prevent introduction of undesired impurities into the crystal. The crystal can be a bulk single crystal that is cut and processed into wafer form of specified thickness. A dopant in a concentration ranging from 1×1015 atoms per cubic centimeter (atoms/cc) to 5×1021 atoms/cc can increase resistivity of the crystal relative to intrinsic ZnO. The dopant can be lithium (Li), sodium (Na), copper (Cu), nitrogen (N), phosphorus (P), and/or manganese (Mn).
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