Transversely-excited film bulk acoustic resonator with tether-supported diaphragm

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11750168
APP PUB NO 20220149805A1
SERIAL NO

17584324

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Abstract

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An acoustic resonator device includes a substrate and a piezoelectric plate. A first portion of the piezoelectric plate is on the substrate. A second portion of the piezoelectric forms a diaphragm suspended over a cavity in the substrate. An interdigital transducer (IDT) is on a surface of the piezoelectric plate, the IDT including first and second busbars on the first portion and interleaved IDT fingers on the diaphragm. A plurality of tethers support the diaphragm over the cavity, each tether providing an electrical connection between a corresponding one of the interleaved IDT fingers and one of the first and second busbars.

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Patent Owner(s)

  • MURATA MANUFACTURING CO LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yantchev, Ventsislav Sofia, BG 128 1625

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