Substrate holder and plating apparatus
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United States of America Patent
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Mar 8, 2011
Grant Date -
Jan 7, 2010
app pub date -
Sep 4, 2009
filing date -
Jun 21, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention is to provide a substrate holder which can effect a more complete sealing with a sealing member and makes it possible to take a substrate out of the substrate holder easily and securely, and also a plating apparatus provided with the substrate holder. The substrate holder includes: a fixed holding member and a movable holding member for holding a substrate therebetween; a sealing member mounted to the fixed holding member or the movable holding member; and a suction pad for attracting a back surface of the substrate held between the fixed holding member and the movable holding member.
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Cited Art Landscape
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