MIM capacitor in finFET structure
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United States of America Patent
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Aug 26, 2014
Grant Date -
Aug 21, 2014
app pub date -
Aug 30, 2013
filing date -
Feb 15, 2013
priority date (Note) -
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Abstract
A FinFET structure which includes: silicon fins on a semiconductor substrate, each silicon fin having two sides and a horizontal surface; sequential layers of a first layer of titanium nitride, a dielectric layer and a second layer of titanium nitride on the sides and horizontal surface of the silicon fins; a polysilicon gate layer over the second layer of titanium nitride on the silicon fins and over the semiconductor substrate such that first and second ends of the silicon fins protrude from the polysilicon layer; spacers adjacent to the polysilicon gate layer; epitaxial silicon over the first and second ends of the silicon fins to form sources and drains, wherein the combination of the first layer of titanium nitride, dielectric layer and second layer of titanium nitride forms a metal-insulator-metal capacitor situated between each silicon fin and the polysilicon layer.
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