Probe polishing method and probe polishing member
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United States of America Patent
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Dec 16, 2008
Grant Date -
Jun 21, 2007
app pub date -
Dec 15, 2006
filing date -
Dec 19, 2005
priority date (Note) -
In Force
status (Latency Note)
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Abstract
In a probe polishing method, a plurality of probes, which are arranged on a probe card for performing an inspection of electrical characteristics of a target object, are polished by using a polishing member. Further, the probes are polished over plural times, while changing a relative position of the abrasive sheet with respect to the probe card.
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