Vertically adjustable plasma source

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11705312
SERIAL NO

17134280

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The disclosure describes a plasma source assemblies comprising a differential screw assembly, an RF hot electrode, a top cover, an upper housing and a lower housing. The differential screw assembly is configured to provide force to align the plasma source assembly vertically matching planarity of a susceptor. More particularly, the differential screw assembly increases a distance between the top cover and the upper housing to align the gap with the susceptor. The disclosure also provides a better thermal management by cooling fins. A temperature capacity of the plasma source assemblies is extended by using titanium electrode. The disclosure provides a cladding material covering a portion of a first surface of RF hot electrode, a second surface of RF hot electrode, a bottom surface of RF hot electrode, a portion of a surface of the showerhead and a portion of lower housing surface.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dzilno, Dmitry A Sunnyvale, US 39 79
Lee, Jared Ahmad San Jose, US 48 1995
Ramadas, Rakesh Santa Clara, US 7 15
Srinivasan, Sriharish Bangalore, IN 6 3
Tanaka, Tsutomu Santa Clara, US 396 10589
Wilson, Gregory J Kalispell, US 143 1688

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