Capacitive acceleration sensor
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United States of America Patent
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May 18, 2010
Grant Date -
Nov 11, 2004
app pub date -
Feb 10, 2004
filing date -
Feb 11, 2003
priority date (Note) -
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Abstract
The invention relates to measuring devices used in the measuring of acceleration and, more specifically, to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention contains a movable electrode (5) supported at an axis of rotation (7). The capacitance change in the pair of electrodes of the acceleration sensor, according to the present invention, is enhanced. The acceleration sensor structure, according to the present invention, enables improving the capacitance sensitivity of the pair of electrodes based on rotational motion and measuring acceleration with good performance in capacitive acceleration sensor designs.
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