Chip shuttle track
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United States of America Patent
Stats
-
Jul 26, 1983
Grant Date -
N/A
app pub date -
Dec 19, 1980
filing date -
Dec 19, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A transport system is disclosed, including an air film shuttle conveyor for conveying semiconductor chips from a loading to an unloading station, the conveyor comprising a base plate and upstanding side guide walls extending longitudinally of the base plate, the guide walls being spaced apart a distance slightly greater than the lateral dimension of said chips; further included are means providing a laminar air flow which surrounds the chips and forms an air film supporting them and propelling them downstream such that the slight spacing between the chips and the guide walls causes the flow resistance to be higher in the one region defined by said slight spacing than in the region defined by the spacing between the chips, whereby a continuous and flexible separation action occurs between the chips.
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