:Si composite material compositions and methods of making same
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United States of America Patent
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Sep 7, 2010
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app pub date -
Aug 11, 2005
filing date -
Aug 11, 2005
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Abstract
:Si material that exhibits the properties of SiOx, and yet is electrically conductive due to the presence of Si. Such a composite material finds many uses, such as a target for DC and/or AC sputtering processes to produce silicon oxide thin films for touch-screen applications, barrier thin films in LCD displays and optical thin films used in a wide variety of applications.
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