Cleaning sheet and method of cleaning substrate processing equipment
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United States of America Patent
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Dec 7, 2010
Issued Date -
N/A
app pub date -
Nov 10, 2003
filing date -
Nov 25, 2002
priority date (Note) -
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Abstract
are extractable with pure water each in an amount of not greater than 20 ppm, when extracted under boiling at 120° C. for 1 hour, and a pressure-sensitive adhesive layer provided on the other side of the base material, a carrying material with cleaning capacity comprising the aforementioned cleaning sheet laminated on a carrying material with a pressure-sensitive adhesive layer. The present disclosure also relates to a method for cleaning a substrate processing equipment which comprises conveying the aforementioned carrying material with cleaning capacity into the substrate processing equipment.
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