System apparatus and method for enhancing electrical clamping of substrates using photo-illumination

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United States of America Patent

PATENT NO 11538714
APP PUB NO 20210366759A1
SERIAL NO

16880518

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Abstract

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An apparatus may include a clamp to clamp a substrate wherein the clamp is arranged opposing a back side of the substrate; and an illumination system, disposed to direct radiation to the substrate, when the substrate is disposed on the clamp, wherein the radiation comprises a radiation energy, equal to or above a threshold energy to generate mobile charge in the substrate, where the illumination system is disposed to direct radiation to the back side of the substrate.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anella, Steven M West Newbury, US 18 39
Blake, Julian G Gloucester, US 61 971
Chen, Qin Santa Clara, US 71 472
Fischer, Jonathan D Lynn, US 6 9
Osborne, Michael W Clinton, US 23 239

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