Method of manufacturing a ferroelectric capacitor having RU1-XOX electrode

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United States of America Patent

PATENT NO 7271054
APP PUB NO 20050170534A1
SERIAL NO

11055177

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A ferroelectric capacitor has the property that polarization of a ferroelectric thin film can readily be reversed and polarization-reversal charge increased. The ferroelectric capacitor has a bottom electrode, a ferroelectric thin film and a top electrode. The top electrode includes a metal crystalline phase and 0.5 to 5 atm % interstitial oxygen atoms in the metal crystalline phase.

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Patent Owner(s)

  • RENESAS ELECTRONICS CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hase, Takashi Kanagawa, JP 89 1116

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