Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and method for controlling the laser apparatus

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United States of America Patent

PATENT NO 8811436
APP PUB NO 20130051412A1
SERIAL NO

13696497

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Abstract

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A laser apparatus may include a master oscillator configured to output a laser beam, at least one amplifier disposed in a beam path of the laser beam from the master oscillator, at least one power source for applying a high-frequency voltage to the at least one amplifier, and a controller for varying the high-frequency voltage to be applied to the at least one amplifier from the at least one power source.

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Patent Owner(s)

  • GIGAPHOTON INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miyao, Kenichi Oyama, JP 2 17
Niwano, Motoki Oyama, JP 5 39
Wakabayashi, Osamu Hiratsuka, JP 388 4061

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