Stage apparatus
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United States of America Patent
Stats
-
Aug 28, 2001
Issued Date -
N/A
app pub date -
Nov 18, 1997
filing date -
Mar 5, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A stage apparatus for moving a table, on which a work is carried, of a semiconductor producing equipment or the like on a base by way of a driving shaft and positioning the table at a predetermined position. The stage apparatus comprises a guide mechanism for guiding and supporting the table on the base; a linear motor provided between the base and the table along a direction in which the table is fed; and controlling means for controlling, for a predetermined period before the table is stopped, stopping operations of the driving shaft and the linear motor in a mutually associated relationship in accordance with predetermined controlling conditions.
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Cited Art Landscape
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