Aromatic resins for underlayers

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United States of America Patent

PATENT NO 11175581
APP PUB NO 20180157175A1
SERIAL NO

15802094

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Abstract

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Polyarylene resins and compositions containing them are useful as underlayers in semiconductor manufacturing processes.

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Patent Owner(s)

  • ROHM AND HAAS ELECTRONIC MATERIALS LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cameron, James F Brookline, US 107 1054
Coley, Suzanne M Mansfield, US 30 151
Cui, Li Westborough, US 33 35
Kaitz, Joshua A Watertown, US 5 11
Liu, Sheng Bow, US 260 4374
Yamada, Shintaro Shrewsbury, US 87 469
Zhang, Keren Shrewsbury, US 25 56

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