Surface acoustic wave device
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United States of America Patent
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Nov 28, 2006
Issued Date -
N/A
app pub date -
Apr 29, 2004
filing date -
Jun 17, 2003
priority date (Note) -
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Abstract
A surface acoustic wave device includes a piezoelectric substrate and interdigital electrodes disposed on the piezoelectric substrate, wherein each of the interdigital electrodes includes a main electrode layer made of Cu or an alloy that has Cu as its main component. The surface acoustic wave device also includes a tightly adhering layer which is disposed between the main electrode layer and the piezoelectric substrate and whose main component is NiCr, or a tightly adhering layer whose main component is Ti and whose film thickness is within a range of about 18 nm to about 60 nm.
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